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SPIRES-BOOKS: FIND KEYWORD MICROREACTORS *END*INIT* use /tmp/qspiwww.webspi1/4610.103 QRY 131.225.70.96 . find keyword microreactors ( in books using www Cover
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Call number:SPRINGER-2010-9789048138074:ONLINE Show nearby items on shelf
Title:Advanced Materials and Technologies for Micro/Nano-Devices, Sensors and Actuators [electronic resource]
Author(s): Evgeni Gusev
Eric Garfunkel
Arthur Dideikin
Date:2010
Publisher:Dordrecht : Springer Netherlands
Size:1 online resource
Note:Springer e-book platform
Note:Springer 2013 e-book collections
Note:The main goal of this book is to review recent progress and current status of MEMS/NEMS technologies and devices. Several important areas are discussed: history of research in the field, device physics, examples of sucessfulapplications, sensors, mat erials and processing aspects. The authors who have contributed to the book represent a diverse group of leading scientists from academic, industrial and governmental labs worldwide who bring a broad array ofbackgrounds such as device physics, technologis ts, electrical and mechanical engineering, surface chemistry and materials science). The contributions to this book are accessible to both expert scientists and engineers who need to keepup with leading edge research, and newcomers to the field who wish t o learn more about the exciting basic and applied research issues relevant to micromechanical devices and technologies
Note:Springer eBooks
Contents:MEMS/NEMS Technologies and Applications
History of Early Research on MEMS in Russia (U.S.S.R.)
Challenges of Complete CMOS/MEMS Systems Integration
MEMS for Practical Applications
Nanochip: A MEMS
Based Ultra
High Data Density Memory Device
Low Cost Silicon Coriolis Gyroscope Paves the Way to Consumer IMU
Microwave and Millimetre Wave Devices Based on Micromachining of III
V Semiconductors
Monocrystalline
Silicon Microwave MEMS Devices
Three
Dimensional Photonic Crystals Based on Opal
Semiconductor and Opal
Metal Nanocomposites
MEMS Device and Reliability Physics
ISBN:9789048138074
Series:e-books
Series:SpringerLink (Online service)
Series:NATO Science for Peace and Security Series B: Physics and Biophysics, 1874-6500
Series:Physics and Astronomy (Springer-11651)
Keywords: Chemistry , Microreactors , Mechanics , Mechanical engineering , Engineering , Microwaves
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Location: ONLINE

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