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SPIRES-BOOKS: FIND KEYWORD SEMICONDUCTORS ETCHING *END*INIT* use /tmp/qspiwww.webspi1/5730.11 QRY 131.225.70.96 . find keyword semiconductors etching ( in books using www Cover
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Call number:9783319290966:ONLINE Show nearby items on shelf
Title:Recent Trends in Materials and Devices Proceedings ICRTMD 2015
Author(s):
Date:2017
Size:1 online resource (XXVII, 547 p. 315 illus., 226 illus. in color p.)
Contents:Thermal Characterization of Single-Walled Carbon Nanotubes and Tungsten Oxide-Based Nanomaterials via Raman Spectroscopy -- Carbon: The Soul of Future Nanoelectronics -- Antireflection Properties of Multi-Crystalline Black Silicon
with Acid Textured surfaces using Two Step Metal Assisted Chemical Etching -- Enhanced Removal of Cationic dye Methylene blue from aqueous solution using Nanocellulose prepared from agricultural waste Sugarcane bagasse -- A Review on
Thermophysical Properties of Nanoparticle-Enhanced Phase Change Materials for Thermal Energy Storage
ISBN:9783319290966
Series:eBooks
Series:Springer eBooks
Series:Springer 2017 package
Keywords: Physics , Energy storage , Nanoscale science , Nanoscience , Nanostructures , Semiconductors , Optical materials , Electronic materials , Nanotechnology , Physics , Nanoscale Science and Technology , Optical and Electronic Materials , Semiconductors , Energy Storage , Nanotechnology
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Call number:TK7874.W635::2000 Show nearby items on shelf
Title:Silicon processing for the VLSI era
Author(s): Stanley Wolf
Richard N. Tauber
Date:2000
Publisher:Lattice Press
Note:Volume 1: Process technology
Note:2nd ed.
ISBN:0961672161
Keywords: Semiconductors etching , Integrated circuits - Very large scale integration , Silicon
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Call number:TK7871.85.S9883::2012 Show nearby items on shelf
Title:Semiconductor devices, physics and technology
Author(s): S.M. Sze
Ming-Kwei Lee
Date:2012
Edition:3rd ed.
Publisher:Wiley
Size:578 p.
Contents:Introduction -- Energy Bands and Carrier Concentration in Thermal Equilibrium -- Carrier Transport Phenomena -- p-n junction -- Bipolar Transistor and Related Devices -- MOS Diode and MOSFET -- Advanced MOSFET and Related Devices -- MESFET and Related Devices -- Microwave Diodes, Quantum-Effect, and Hot-Electron Devices -- LEDs and Lasers -- Photo detectors and Solar Cells -- Crystal Growth and Epitaxy -- Film Formation -- Lithography and Etching -- Impurity Doping -- Integrated Devices.
ISBN:9780470537947
Keywords: Semiconductors.
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Call number:SPRINGER-2000-9783662040744:ONLINE Show nearby items on shelf
Title:Laser Processing and Chemistry
Author(s): Dieter Bäuerle
Date:2000
Edition:Third, Revised and Enlarged Edition
Size:1 online resource (5 p.)
Note:10.1007/978-3-662-04074-4
Contents:I Overview and Fundamentals -- 1 Introduction -- 2 Thermal, Photophysical, and Photochemical Processes -- 3 Reaction Kinetics and Transport of Species -- 4 Nucleation and Cluster Formation -- 5 Lasers, Experimental Aspects, Spatial
Confinement -- II Temperature Distributions and Surface Melting -- 6 General Solutions of the Heat Equation -- 7 Semi-infinite Substrates -- 8 Infinite Slabs -- 9 Non-uniform Media -- 10 Surface Melting -- III Material Removal -- 11
Vaporization, Plasma Formation -- 12 Nanosecond-Laser Ablation -- 13 Ultrashort-Pulse Laser Ablation -- 14 Etching of Metals and Insulators -- 15 Etching of Semiconductors -- IV Material Deposition -- 16 Laser-CVD of Microstructures --
17 Growth of Fibers -- 18 Direct Writing -- 19 Thin-Film Formation by Laser-CVD -- 20 Adsorbed Layers, Laser—MBE -- 21 Liquid-Phase Deposition, Electroplating -- 22 Thin-Film Formation by Pulsed-Laser Deposition and Laser-Induced
Evaporation -- V Material Transformations, Synthesis and Structure Formation -- 23 Structural Transformations, Laser Cleaning -- 24 Doping -- 25 Cladding, Alloying, and Synthesis -- 26 Oxidation, Nitridation, and Reduction -- 27
Transformation and Decomposition of Organic Materials -- 28 Instabilities and Structure Formation -- VI Measurement Techniques, Diagnostics -- 29 Measurement Techniques -- 30 Analysis of Species, Plasmas, and Surfaces -- Appendices --
A Definitions and Formulas -- A.1 Symbols and Conversion Factors -- A.2 Abbreviations, Acronyms -- A.3 Mathematical Functions and Relations -- A.3.1 Bessel Function -- A.3.2 Error Function -- A.3.3 Exponential Integral Function --
A.3.4 Gamma Function -- A.3.5 Heaviside Function -- A.3.6 Jacobian Theta Function -- A.4.1 Axial Temperature Distribution for Infinite Slabs -- A.4.2 Axial Temperature Distribution for Semi-infinite Substrates -- B Tabular Presentation
of the Materials Investigated -- B.1 Ablation of Inorganic Materials -- B.2 Ablation of Organic Polymers -- B.3 Materials Etching -- B.4 LCVD of Microstructures -- B.5 Thin-Film Formation by LCVD -- B.6 Deposition From Adsorbed Layers
and Atomic/Molecular Beams -- B.7 Deposition from Liquids -- B.8 Formation of Thin Films and Heterostructures by PLD -- B.9 Laser Cleaning of Substrates from Particulates -- B.10 Surface Oxidation, Nitridation, and Reduction -- B.11
Transformation and Decomposition of Organic Materials, Laser Lithography -- B.12 Biological and Medical Applications -- C Tables -- References
ISBN:9783662040744
Series:eBooks
Series:SpringerLink (Online service)
Series:Springer eBooks
Keywords: Physics , Lasers , Photonics , Optics , Optoelectronics , Plasmons (Physics) , Industrial engineering , Materials science , Materials , Thin films , Physics , Optics, Optoelectronics, Plasmonics and Optical Devices , Laser Technology, Photonics , Surfaces and Interfaces, Thin Films , Operating Procedures, Materials Treatment , Characterization and Evaluation of Materials
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Call number:SPRINGER-1998-9784431679370:ONLINE Show nearby items on shelf
Title:Near-field Nano/Atom Optics and Technology
Author(s):
Date:1998
Size:1 online resource (302 p.)
Note:10.1007/978-4-431-67937-0
Contents:1. Introduction -- 1.1 Near-Field Optics and Related Technologies -- 1.2 History of Near-Field Optics and Related Technologies -- 1.3 Basic Features of an Optical Near Field -- 1.4 Building Blocks of Near-Field Optical Systems -- 1.5
Comments on the Theory of Near-Field Optics -- 1.6 Composition of This Book -- References -- 2. Principles of the Probe -- 2.1 Basic Probe -- 2.2 Functional Probe: New Contrast Mechanisms -- References -- 3. Probe Fabrication -- 3.1
Introduction -- 3.2 Selective Etching of a Silica Fiber Composed of a Core and Cladding -- 3.3 Selective Etching of a Dispersion Compensating Fiber -- 3.4 Protrusion-Type Probe -- 3.5 Hybrid Selective Etching of a Double-Cladding Fiber
-- 3.6 Probe for Ultraviolet NOM Applications -- References -- 4. High-Throughput Probes -- 4.1 Introduction -- 4.2 Excitation of the HE-Plasmon Mode -- 4.3 Multiple-Tapered Probes -- References -- 5. Functional Probes -- 5.1
Introduction -- 5.2 Methods of Fixation -- 5.3 Selecting a Functional Material -- 5.4 Probe Characteristics and Applications -- 5.5 Future Directions -- References -- 6. Instrumentation of Near-Field Optical Microscopy -- 6.1 Operation
Modes of NOM -- 6.2 Scanning Control Modes -- References -- 7. Basic Features of Optical Near-Field and Imaging -- 7.1 Resolution Characteristics -- 7.2 Factors Influencing Resolution -- 7.3 Polarization Dependence -- References -- 8.
Imaging Biological Specimens -- 8.1 Introduction -- 8.2 Observation of Flagellar Filaments by c-Mode NOM -- 8.3 Observation of Subcellular Structures of Neurons by i-Mode NOM -- 8.4 Imaging of Microtubules by c-Mode NOM -- 8.5 Imaging
of Fluorescent-Labeled Biospecimens -- 8.6 Imaging DNA Molecules by Optical Near-Field Intensity Feedback -- References -- 9. Diagnosing Semiconductor Nano-Materials and Devices -- 9.1 Fundamental Aspects of Near-Field Study of
Semiconductors -- 9.2 -- 9.3 Low-Temperature Single Quantum Dot Spectroscopy -- 9.4 Ultraviolet Spectroscopy of Polysilane Molecules -- 9.5 Raman Spectroscopy of Semiconductors -- 9.6 Diagnostics of Al Stripes in an Integrated Circuit
-- References -- 10. Toward Nano-Photonic Devices -- 10.1 Introduction -- 10.2 Use of Surface Plasmons -- 10.3 Application to High-Density Optical Memory -- References -- 11. Near-Field Optical Atom Manipulation: Toward Atom Photonics
-- 11.1 Introduction -- 11.2 Cylindrical Optical Near Field for Atomic Quantum Wires -- 11.3 Atomic Quantum Wires -- 11.4 Optically Controlled Atomic Deposition -- 11.5 Near-Field Optical Atomic Funnels -- 11.6 Atomic Quantum Dots --
11.7 Future Outlook -- References -- 12. Related Theories -- 12.1 Comparison of Theoretical Approaches -- 12.2 Semi-microscopic and Microscopic Approaches -- 12.3 Numerical Examples -- 12.4 Effective Field and Massive Virtual Photon
Model -- 12.5 Future Direction -- References
ISBN:9784431679370
Series:eBooks
Series:SpringerLink (Online service)
Series:Springer eBooks
Keywords: Physics , Optics , Optoelectronics , Plasmons (Physics) , Physics , Optics, Optoelectronics, Plasmonics and Optical Devices
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Call number:SPRINGER-1996-9783662032534:ONLINE Show nearby items on shelf
Title:Laser Processing and Chemistry
Author(s): Dieter Bäuerle
Date:1996
Edition:Second Edition
Size:1 online resource (5 p.)
Note:10.1007/978-3-662-03253-4
Contents:I: Overview and Fundamentals -- 1 Introduction -- 2 Thermal, Photophysical, and Photochemical Processes -- 3 Reaction Kinetics and Transport of Species -- 4 Nucleation and Cluster Formation -- 5 Lasers, Experimental Aspects, Spatial
Confinement -- II: Temperature Distributions and Surface Melting -- 6 General Solutions of the Heat Equation -- 7 Semi-infinite Substrates -- 8 Infinite Slabs -- 9 Non-uniform Media -- 10 Surface Melting -- III: Material Removal -- 11
Vaporization, Plasma Formation -- 12 Pulsed-Laser Ablation -- 13 Modelling of Pulsed-Laser Ablation -- 14 Etching of Metals and Insulators -- 15 Etching of Semiconductors -- IV: Material Deposition -- 16 Laser-CVD of Microstructures --
17 Growth of Fibers -- 18 Direct Writing -- 19 Thin-Film Formation by Laser-CVD -- 20 Adsorbed Layers, Laser-MBE -- 21 Liquid-Phase Deposition, Electroplating -- 22 Thin-Film Formation by Pulsed-Laser Deposition and Laser-Induced
Evaporation -- V: Surface Transformations, Synthesis and Structure Formation -- 23 Structural Transformations -- 24 Doping -- 25 Cladding, Alloying, and Synthesis -- 26 Oxidation, Nitridation -- 27 Depletion and Exchange of Species --
28 Instabilities and Structure Formation -- VI: Measurement Techniques, Diagnostics -- 29 Measurement Techniques -- 30 Analysis of Species, Plasmas, and Surfaces -- Appendix A: Definitions and Formulas -- A.1: Symbols and Conversion
Factors -- A.2: Abbreviations, Acronyms -- A.3: Mathematical Functions and Relations -- A.4: The Density of Dissociated Species -- A.5: The F-Function -- Appendix B: Tabular Presentation of the Materials Investigated -- B.1: Ablation
of Inorganic Materials -- B.2: Ablation of Organic Polymers and Biological Materials -- B.3: Materials Etching -- B.4: LCVD of Microstructures -- B.5: Thin-Film Formation by LCVD -- B.6: Deposition from Adsorbed Layers, Laser-MBE,
Laser-ALE -- B.7: Deposition from Liquids -- B.8: Formation of Thin Films and Heterostructures by PLD -- B.9: Surface Oxidation and Nitridation -- B.10: Surface Modifications, Transformation of Solid Films -- Tables -- References
ISBN:9783662032534
Series:eBooks
Series:SpringerLink (Online service)
Series:Springer eBooks
Keywords: Physics , Physical chemistry , Quantum optics , Condensed matter , Lasers , Photonics , Industrial engineering , Electronics , Microelectronics , Physics , Condensed Matter Physics , Laser Technology, Photonics , Quantum Optics , Physical Chemistry , Electronics and Microelectronics, Instrumentation , Operating Procedures, Materials Treatment
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Call number:SPRINGER-1995-9783662031209:ONLINE Show nearby items on shelf
Title:Porous Silicon Science and Technology Winter School Les Houches, 8 to 12 February 1994
Author(s):
Date:1995
Size:1 online resource (358 p.)
Note:10.1007/978-3-662-03120-9
Contents:Lecture 1 Fundamental aspects of the semiconductor-solution interface -- Lecture 2 The silicon/electrolyte interface -- Lecture 3 Porous silicon: material processing, properties and applications -- Lecture 4 Luminescence of porous
silicon after electrochemical oxidation -- Lecture 5 Mechanism for light emission from nanoscale silicon -- Lecture 6 Theory of silicon crystallites. Part II -- Lecture 7 Doping of a quantum dot and self-limiting effect in
electrochemical etching -- Lecture 8 Electronic and optical properties of semiconductors quantum wells -- Lecture 9 What can be learned from time resolved measurements on porous silicon luminescence -- Lecture 10 Ion beam analysis of
thin films. Applications to porous silicon -- Lecture 11 IR spectroscopy of porous silicon -- Lecture 12 Nano characterization of porous silicon by transmission electron microscopy -- Lecture 13 Electron paramagnetic resonance
spectroscopy: Defect and structural analysis of solids -- Lecture 14 Raman scattering in silicon nanostructures -- Lecture 15 Scattering of X-rays -- Lecture 16 X-ray photoemission spectroscopy -- Lecture 17 Optoelectronic properties
of porous silicon. The electroluminescent devices -- Lecture 18 Porous silicon luminescence under cathodic polarisation conditions -- Lecture 19 Interrelation between electrical properties and visible luminescence of porous silicon --
Lecture 20 Characteristics of porous n-type silicon obtained by photoelectrochemical etching -- Lecture 21 Porous Si: From single porous layers to porosity superlattices
ISBN:9783662031209
Series:eBooks
Series:SpringerLink (Online service)
Series:Springer eBooks
Series:Centre de Physique des Houches : 1
Keywords: Physics , Crystallography , Optics , Optoelectronics , Plasmons (Physics) , Engineering , Electrical engineering , Physics , Optics, Optoelectronics, Plasmonics and Optical Devices , Crystallography , Engineering, general , Communications Engineering, Networks
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Call number:SPRINGER-1995-9781461522096:ONLINE Show nearby items on shelf
Title:Fundamentals of Semiconductor Processing Technology
Author(s): Badih El-Kareh
Date:1995
Size:1 online resource (602 p.)
Note:10.1007/978-1-4615-2209-6
Contents:1 Semiconductor Crystals -- 1.1 Crystals and Crystallographic Orientations -- 1.2 The Silicon Crystal -- 1.3 Wafer Preparation -- 1.4 Compound Semiconductors -- 2 Thermal Oxidation and Nitridation -- 2.1 SiO2 and SiO2-Si Interface --
2.2 Thermal Oxidation -- 2.3 Silicon Nitride -- 3 Thin Film Deposition -- 3.1 Chemical Vapor Deposition -- 3.2 Chemical-Physical Deposition Processes -- 3.3 Physical-Vapor Deposition -- 4 Lithography -- 4.1 Optical Lithography -- 4.2
Resolution Enhancement Techniques -- 4.3 Electron-Beam Lithography -- 4.4 X-Ray Lithography -- 4.5 Ion-Beam Lithography -- 5 Contamination Control and Etch -- 5.1 Clean Processes -- 5.2 Etching -- 6 Ion Implantation -- 6.1 Principle of
Operation -- 6.2 Energy Loss and Range Distribution -- 6.3 Crystal Damage and Dopant Activity -- 7 Diffusion -- 7.1 Point Defects -- 7.2 Fick’s Laws -- 7.3 Non-Constant Diffusivity -- 7.4 Diffusion in Polysilicon -- 7.5 Diffusion in
Insulators -- 7.6 Diffusion Sources -- 7.7 Gettering in Silicon -- 8 Contact and Interconnect Technology -- 8.1 Contact Metallurgy -- 8.2 Poly-Metal Dielectrics -- 8.3 Metal Interconnects -- 8.4 Inter-Level Dielectrics -- 8.5
Multi-Level Metals -- 8.6 Reliability Considerations
ISBN:9781461522096
Series:eBooks
Series:SpringerLink (Online service)
Series:Springer eBooks
Keywords: Physics , Semiconductors , Electrical engineering , Electronics , Microelectronics , Electronic circuits , Physics , Semiconductors , Electronics and Microelectronics, Instrumentation , Circuits and Systems , Electrical Engineering
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Call number:SPRINGER-1995-9781461519676:ONLINE Show nearby items on shelf
Title:Quantum Transport in Ultrasmall Devices Proceedings of a NATO Advanced Study Institute on Quantum Transport in Ultrasmall Devices, held July 17–30, 1994, in II Ciocco, Italy
Author(s):
Date:1995
Size:1 online resource (544 p.)
Note:10.1007/978-1-4615-1967-6
Contents:Lectures -- to Quantum Transport -- Traditional Modelling of Semiconductor Devices -- Quantum Confined Systems: Wells, Wires, and Dots -- Fabrication of Nanoscale Devices -- Artificial Impurities in Quantum Wires and Dots --
Mesoscopic Devices—What are They -- Trajectories in Quantum Transport -- Two-Dimensional Dynamics of Electrons Passing Through a Point Contact -- Localized Acoustic Phonons in Low Dimensional Structures -- Conductance in Quantum Boxes:
Interference and Single Electron Effects -- Quantum Traffic Theory of Single Electron Transport in Nanostructures -- Some Recent Developments in Quantum Transport in Mesoscopic Structures and Quantum Wells -- Density Matrix Simulations
of Semiconductor Devices -- Effects of Band-Structure and Electric Fields on Resonant Tunneling Dynamics -- Interacting and Coherent Time-Dependent Transport in Semiconductor Heterostructures -- Recursive Tight-Binding Green’s Function
Method: Application to Ballistic and Dissipative Transport in Semiconductor Nanostructures -- Screening and Many-Body Effects in Low-Dimensional Electron Systems -- Quantum Kinetics in Laser Pulse Excited Semiconductors -- Statistical
Fluctuations in Devices -- Multiband and Multidimensional Analysis of Quantum Transport in Ultrasubmicron Devices -- Contributed Papers -- Vapor Etching of Beam-Deposited Carbon on Silicon Dioxide Films -- Electron Heating in GaAs due
to Electron-Electron Interactions -- Transport and Optical Spectroscopy of an Array of Quantum Dots with Strong Coulomb Correlations -- Three-Dimensional Quantum Transport Simulations of Transmission Fluctuations in a Quantum Dot --
Acoustic Scattering of Electrons in a Narrow Quantum Well -- Non-Ohmic Phonon-Assisted Landauer Resistance -- Acoustic Phonon Relaxation in Valence Band Quantum Wells -- Stationary Transport of Holes in GaAs -- Beating Pattern in the
Magneto-Oscillations of the 2DEG in Semiconductor Quantum Wells -- Ultrafast Coherent and Incoherent Dynamics in Photoexcited Semiconductors -- Theoretical Analysis of Terahertz-Emission from Asymmetric Double-Quantum Wells -- Carrier
Transport in Quantum Well Lasers: A Comparison between Different Heterostructures -- Small Signal Differential Mobility of Planar Superlattice Miniband Transport and Negative Differential Conductance -- General Conditions for Stability
in Bistable Electrical Devices with S- or Z-Shaped Current-Voltage Characteristics -- Quantum Hydrodynamics: Derivation and Classical Limit -- A Transfer-Matrix Approach to Photon-Assisted Tunneling through a Driven Double-Barrier
Diode -- Dynamics of Resonant Tunneling Domains in Superlattices: A Discrete Drift Model -- Nonequilibrium Phenomena in Split Gate Quantum Waveguides -- Theory of Delta-Wires -- Model and Transport in a Three-Layered Heterostructure
with Thin Quantum Wells in the Schottky Layer -- Dissipation Effects in Quantum Tunneling -- A First Step for Semiconductor Quantum Device Modeling with Incoherent Scattering -- Evaluation of the Mobility in a Si-SiO2 Inversion Layer
at T=0 K Using Green’s Function Formalism -- Linearized Quantum Transport Equations in Periodic Fields -- Photograph -- Participants
ISBN:9781461519676
Series:eBooks
Series:SpringerLink (Online service)
Series:Springer eBooks
Series:NATO ASI Series, Series B: Physics: 342
Keywords: Physics , Condensed matter , Solid state physics , Crystallography , Spectroscopy , Microscopy , Electrical engineering , Optical materials , Electronic materials , Physics , Solid State Physics , Spectroscopy and Microscopy , Condensed Matter Physics , Crystallography , Electrical Engineering , Optical and Electronic Materials
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Call number:SPRINGER-1993-9783540478508:ONLINE Show nearby items on shelf
Title:Physics and Technology of Semiconductor Quantum Devices Proceedings of the International School Held in Mesagne (Brindisi), Italy 21–26 September 1992
Author(s):
Date:1993
Size:1 online resource (1 p.)
Note:10.1007/BFb0034400
Contents:Epitaxial growth of nanostructured III–V Semiconductors -- Technology and fabrication of quantum devices: Submicron lithography and etching techniques -- Band gap engineering in low dimensional semiconductors -- Electronic and optical
properties of low-dimensional semiconductor structures -- Electronic structure and electrical characterisation of semiconductor heterostructures -- New optoelectronic devices -- High speed devices: Properties and applications -- New
Concepts to fabricate semiconductor quantum wire and quantum dot structures
ISBN:9783540478508
Series:eBooks
Series:SpringerLink (Online service)
Series:Springer eBooks
Series:Lecture Notes in Physics: 419
Keywords: Physics , Quantum physics , Quantum optics , Lasers , Photonics , Optics , Optoelectronics , Plasmons (Physics) , Quantum computers , Spintronics , Physics , Optics, Optoelectronics, Plasmonics and Optical Devices , Quantum Information Technology, Spintronics , Quantum Physics , Laser Technology, Photonics , Quantum Optics
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Call number:SPRINGER-1992-9784431669227:ONLINE Show nearby items on shelf
Title:Science and Technology of Mesoscopic Structures
Author(s):
Date:1992
Size:1 online resource (469 p.)
Note:10.1007/978-4-431-66922-7
Contents:1 The Evolution of Semiconductor Superlattices and Other Quantum Structures -- 2 Mesoscopic Physics of Small Metallic Particles -- 3 Probing Spin-Glass Configurations with Mesoscopic Conductance Fluctuations -- 4 Coherent Ballistic
Transport in Micro-Junctions: Quenching, Fluctuations, and Chaos -- 5 Quasi-Particle Interferometer Controlled by Andreev Reflection -- 6 Conductance Oscillations in Quantum Wires with a Stub Structure -- 7 Sub-Quantum-Limit Electron
Interferometers -- 8 Phase Velocity Tuning in Quantum Point Contacts -- 9 Analysis of Hall Resistance Anomalies with Wave Mechanics -- 10 Green’s Function in Magnetic Fields -- 11 Electronic Transport in a Quasi-Ballistic Narrow Wire
Confined by Split Metal Gates -- 12 Conductance Fluctuations in Quantum Wires: Effects of Strong Spin-Orbit Interaction -- 13 Mesoscopic Phenomena in Magnetotransport Measurements on Two-Dimensional Systems -- 14 Effect of Scattering
on Ballistic Transport in GaAs/GaA1As Heterostructures: Magnetotransport in Anti-Dot Lattice -- 15 Transport in Quasi-Ballistic Quantum Wires and Rings -- 16 Lateral Electronic Superlattices on Semiconductors -- 17 Electron Scattering
Experiments in Mesoscopic Conductors -- 18 Quantum Wires: From Ballistic Conduction to Fluctuations -- 19 Magnetophonon Resonances in Quantum Wires -- 20 Spin-Dependent Nonlocal Quantum Transport Influenced by Gate Voltage in
GaAs/A1GaAs Wires -- 21 Transition from Weak to Strong Spin-Orbit Scattering Effect on Conductance Fluctuation in InGaAs/InAlAs Quantum Wires -- 22 Trajectory Representations, Fluctuations, and Stability of Granular Electronic Devices
-- 23 Superconducting Quantum Point Contacts and Other Mesoscopic Josephson Junctions -- 24 Mesoscopic Josephson Junctions -- 25 One- and Zero-Dimensional Tunneling Diodes Fabricated by Focused Ion Beam Implantation -- 26 Logic
Circuits Using Resonant-Tunneling Hot Electron Transistors (RHETs) -- 27 Electron Charge Distribution and Transport Properties of Narrow Channels -- 28 Observation of the Charging Effect in I–V Characteristics Through a Quantum Dot
Fabricated by a Focused Ion Beam at 4.2K -- 29 Dimension Dependence of Elastic Scattering Effects on Resonant Tunneling -- 30 Observation of the Rotating Angle Dependence of Tunneling Spectra in Heavily Doped n-Type Silicon -- 31
Capacitance in Single Electron Tunneling -- 32 Many-Body Effects in Mesoscopic Double Junctions -- 33 Anomalous Switching-Current Distributions to the Voltage State in a Small Josephson Junction -- 34 Silicon Nanoelectronics: The Road
Less Travelled -- 35 Properties of GaAs-AlGaAs Quantum Wire Superlattices Grown by Molecular Beam Epitaxy -- 36 Nanostructure Technology Developed Through Electron-Beam-Induced Surface Reaction -- 37 MOCVD Methods for Fabricating
Semiconductor Nano-Structures -- 38 Ultra-High Resolution Electron Beam Patterning of SiO2: A Review -- 39 Ultrafine AlGaAs/GaAs Quantum-Well Wire Fabrication by Combining Electron Beam Lithography and Two -Step Wet Chemical Etching --
40 Mesoscopic Structure in Lattice-Mismatched Heteroepitaxial Interface Layers -- 41 Luminescence Properties of Disordered Superlattices -- 42 Photoluminescence Spectra of GaAs Quantum Wires in High Magnetic Fields -- 43 Time Resolved
Nonlinear Optical Spectroscopy of Magnetically Confined Excitons -- 44 Ultrafast Behavior of Optically-Nonlinear Etalons -- 45 Combined Quantum Control of Electron- and Photon-Systems in Semiconductor Mesoscopic Structures: Toward an
Ultimate Goal of Semiconductor Light Emitters -- 46 Superradiance of Excitons in Mesoscopic Systems -- 47 Hole-State Mixing and Nonlinear Optical Properties of Semiconductor Quantum Dots -- 48 Polarization-Dependent Optical
Nonlinearities in GaAs/AlGaAs Fractional Layer Superlattices -- 49 Nonlocal Formulation of Optical Response of an Assembly of Fine Particles -- 50 Resonant Enhancement of Internal Field as a Function of Mesoscopic System Size: An
Unnoticed Source of Large Optical Nonlinearity in Nonlocal Response
ISBN:9784431669227
Series:eBooks
Series:SpringerLink (Online service)
Series:Springer eBooks
Keywords: Physics , Condensed matter , Physics , Condensed Matter Physics
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Call number:SPRINGER-1992-9783642847783:ONLINE Show nearby items on shelf
Title:Hydrogen in Crystalline Semiconductors
Author(s): Stephen J Pearton
Date:1992
Size:1 online resource (363 p.)
Note:10.1007/978-3-642-84778-3
Contents:1. Introduction -- 2. Hydrogen Incorporation in Crystalline Semiconductors -- 2.1 Techniques for Hydrogen Incorporation in Semiconductors -- 2.2 Survey of the Configurations of Hydrogen in Semiconductors -- 3. Passivation of Deep
Levels by Hydrogen -- 3.1 Deep-Level Passivation in Silicon -- 3.2 Passivation of Defects in Gallium Arsenide -- 3.3 Aluminum Gallium Arsenide -- 3.4 Gallium Phosphide -- 3.5 CdHgTe, Zn3P2 -- 3.6 Germanium -- 4. Shallow Impurity
Passivation by Atomic Hydrogen -- 4.1 Silicon -- 4.2 Gallium Arsenide -- 4.3 AlGaAs -- 4.4 CdTe and ZnTe -- 4.5 Gallium Phosphide -- 4.6 Germanium -- 4.7 Indium Phosphide -- 4.8 BN and BP -- 4.9 Correlation with Muonium -- 5.
Microscopic Properties of Hydrogen-Related Complexes in Silicon from Vibrational Spectroscopy -- 5.1 Vibrational Spectroscopy of H-Related Complexes -- 5.2 Uniaxial Stress Studies of H-Related Complexes -- 5.3 Hydrogen Motion in the
B-H Complex -- 5.4 Conclusion -- 6. The Microscopic Characteristics of Impurity-Hydrogen Complexes in III-V Semiconductors -- 6.1 Acceptor-H Complexes -- 6.2 Donor-H Complexes -- 6.3 Unintentional Hydrogenation -- 6.4 Uniaxial Stress
Studies -- 6.5 Cluster Calculations for H-Related Complexes in GaAs -- 6.6 Conclusion -- 7. Hydrogen, and Semiconductor Surfaces and Surface Layers -- 7.1 Etching of Silicon Surfaces by Hydrogen -- 7.2 Plasma Etching -- 7.3
Implantation of Protons -- 7.4 Hydrogen on Semiconductor Surfaces -- 8. Hydrogen-Related Defects in Semiconductors -- 8.1 Hydrogen-Related Defects in Silicon -- 8.2 Hydrogen-Related Defects in Germanium -- 8.3 Hydrogen-Related Defects
in Compound Semiconductors -- 8.4 Hydrogen-Related IR Bands in Silicon -- 9. Diffusion of Hydrogen in Semiconductors -- 9.1 Diffusion of Hydrogen in Solids -- 9.2 Diffusion Equations -- 9.3 Analysis of Diffusion Profiles -- 9.4
Diffusion of Hydrogen in Silicon -- 9.5 Diffusion of Hydrogen in Germanium -- 9.6 Diffusion in Gallium Arsenide -- 9.7 Diffusion of Hydrogen in Other Materials -- 9.8 Summary -- 10. Resonance Studies Pertinent to Hydrogen in
Semiconductors -- 10.1 Electron Paramagnetic Resonance -- 10.2 Related Muon Studies -- 10.3 Perturbed Angular Correlation -- 11. Prevalence of Hydrogen Incorporation and Device Applications -- 11.1 Experimental Studies of Hydrogen
Incorporation -- 11.2 Hydrogen Sensing with MOS Structures -- 11.3 Hydrogen in III-V Semiconductors -- 12. Hydrogen and the Mechanical Properties of Semiconductors -- 12.1 Hydrogen Embrittlement -- 12.2 Hydrogen-Related Defects -- 12.3
m-V Semiconductors -- References
ISBN:9783642847783
Series:eBooks
Series:SpringerLink (Online service)
Series:Springer eBooks
Series:Springer Series in Materials Science: 16
Keywords: Physics , Physical chemistry , Condensed matter , Electronics , Microelectronics , Physics , Condensed Matter Physics , Physical Chemistry , Electronics and Microelectronics, Instrumentation
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Call number:SPRINGER-1990-9781468457339:ONLINE Show nearby items on shelf
Title:Science and Engineering of One- and Zero-Dimensional Semiconductors
Author(s):
Date:1990
Size:1 online resource (350 p.)
Note:10.1007/978-1-4684-5733-9
Contents:1: Fabrication of 1- and 0-D Structures -- Fabrication of Buried GaInAs/Inp Quantum Wires by One-Step MOVPE Growth -- Dry Etching Damage in Nanostructures -- Fabrication and Quantum Properties of 1D and 0D Nanostructures in III–V
Semiconductors -- 2: Transport in 1- and 0-D Structures -- Ballistic Electron Transport in a Gated Constriction -- Quantum-State Spectroscopy in Quantum Wires and Quantum Dots -- Electronic Properties of Quantum Dots and Modulated
Quantum Wires -- Conduction in n+-GaAs Wires -- One Dimensional Electron Transport in Edge-Channels Studied with Quantum Point Contacts -- Electron Waveguide Junctions:Scattering from a Microfabrication-imposed Potential -- Some Ad-Hoc
Methods for Introducing Dissipation to the Schrodinger Equation -- Transport in Electron Waveguides: Non-Linearities and Gated Rings -- Theory of Ballistic Quantum Transport through 1D Constriction -- Bound and Resonant States in
Quantum Wire Structures -- Selective Population of Modes in Electron Waveguides: Bend Resistances and Quenching of the Hall Resistance -- Electronic Properties of Doping Quantum Wires -- Quantum Dot Resonant Tunneling Spectroscopy --
Frequency-Dependent Transport in Quantum Wires -- Transport through Zero-Dimensional States in a Quantum Dot -- 3: Periodic 1- and 0-D Structures -- Lateral Surface Superlattices and Quasi one Dimensional Structures in GaAs --
Magnetotransport and Infrared Resonances in Laterally Periodic Nanostructures -- Emission Processes in Quantum Structures -- Magnetoresistance and Magnetocapacitance in a Two-Dimensional Electron Gas in the Presence of A
One-Dimensional Superlattice Potential -- Theory of Groundstate and Transport Properties of a Two-Dimensional Electron Gas in the presence a Unidirectional Periodic Modulation and a Magnetic Field -- 4: Optical Properties of 1- and 1-D
Structures -- Understanding quantum Confinement in Zero-Dimensional Nanostructures- Optical and Transport Properties -- Exciton-Polaritons in Quantum Wells and Wuantum Wires -- Radiative Recombination in Free Standing Quantum Boxes --
Optical Emission from Quantum Wires -- Raman Scattering and Photoluminescence of GaAs-Based Nanostructures -- On the Impact of Low-Dimensionally in Quantum Well, Wire, Dot-Semiconductor Lasers -- 5: 2-Dimensional Systems -- Excitons in
Low Dimensional Semiconductors -- Resonant Transverse Magnetotunneling through Double Barrier Systems -- Author Index
ISBN:9781468457339
Series:eBooks
Series:SpringerLink (Online service)
Series:Springer eBooks
Series:NATO ASI Series, Series B: Physics: 214
Keywords: Physics , Acoustics , Condensed matter , Solid state physics , Crystallography , Optics , Optoelectronics , Plasmons (Physics) , Spectroscopy , Microscopy , Physics , Optics, Optoelectronics, Plasmonics and Optical Devices , Acoustics , Solid State Physics , Spectroscopy and Microscopy , Condensed Matter Physics , Crystallography
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Call number:SPRINGER-1987-9783642831362:ONLINE Show nearby items on shelf
Title:Laser Processing of Thin Films and Microstructures Oxidation, Deposition and Etching of Insulators
Author(s): Ian W Boyd
Date:1987
Size:1 online resource (320 p.)
Note:10.1007/978-3-642-83136-2
Contents:1. Introduction -- 1.1 Historical Background -- 1.2 Advantages of Laser Technology -- 1.3 Requirements for Laser Processing -- 1.4 Outline -- 2. Interaction and Kinetics -- 2.1 Laser Excitation of Matter -- 2.2 Laser Excitation of the
Gas Species -- 2.3 Interaction of Laser Radiation with Solids -- 2.4 Interactions with Surfaces and Adsorbates -- 2.5 Laser-Induced Heating -- 2.6 Nucleation and Growth -- 2.7 Chemical Reactions and Growth Rates -- 3. Experimental
Considerations -- 3.1 Properties of Laser Beams -- 3.2 Spatial Resolution -- 3.3 Modes of Laser Processing -- 3.4 The Choice of Laser -- 4. Laser-Assisted Oxidation and Nitridation -- 4.1 Oxidation -- 4.2 Background and Theory -- 4.3
Metal Oxidation -- 4.4 Silicon Oxidation -- 4.5 Oxidation of Compound Semiconductors -- 4.6 Nitridation -- 4.7 Laser Curing -- 5. Passivation by Laser Annealing and Melting -- 5.1 Modes of Laser Annealing -- 5.2 Laser Annealing in
Oxygen -- 5.3 Oxygen Implantation -- 5.4 Nitrogen Implantation -- 5.5 Impurity Effects -- 5.6 Laser Cleaning of Surfaces -- 6. Laser-Induced Deposition -- 6.1 Background -- 6.2 Metal Oxides -- 6.3 Silicon Oxide -- 6.4 Silicon Nitride
-- 6.5 Organic Polymer Formation -- 7. Material Removal -- 7.1 Introduction and Background -- 7.2 Etching -- 7.3 Ablation -- 7.4 Trimming -- 7.5 Cutting and Drilling -- 8. Summary and Conclusions -- 8.1 Properties and Applications --
8.2 Future Prospects -- 8.3 Postscript -- References
ISBN:9783642831362
Series:eBooks
Series:SpringerLink (Online service)
Series:Springer eBooks
Series:Springer Series in Materials Science: 3
Keywords: Physics , Optics , Optoelectronics , Plasmons (Physics) , Physics , Optics, Optoelectronics, Plasmonics and Optical Devices
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Call number:SPRINGER-1986-9783642714467:ONLINE Show nearby items on shelf
Title:The Physics and Fabrication of Microstructures and Microdevices Proceedings of the Winter School Les Houches, France, March 25–April 5, 1986
Author(s):
Date:1986
Size:1 online resource (472 p.)
Note:10.1007/978-3-642-71446-7
Contents:I Physics and Engineering of Microfabrication -- High Resolution Lithography (Some Comments on Limits and Future Possibilities) -- Submicron Lithography Tools -- Electron Beam Nanolithography -- The Spin Coating Process Mechanism --
Resists Patterning -- Dry Etching: Concepts, Methods and Applications -- Overlayers -- Self-Aligned Growth of Microstructures -- Laser-Induced Growth of Microstructures -- Structural Characterization of Superlattices by X-Ray
Diffraction -- Recently Developed TEM Approaches for the Characterisation of Semiconductor Heterostructures and Interfaces -- Fabrication of Small Structures of Semiconductors and Metals -- Atomically Controlled Growth in 2, 1 and OD,
and Applications -- Microstructure of Organic Mono- and Multilayers -- II Physics of Microstructures -- Fundamentals of Low Dimensional Physics -- Electron States in Semiconductor Microstructures -- Quantum Transport Theory for
Small-Geometry Structures -- Noise in Microstructures -- Transport Physics of Multicontact Si MOS Nanostructures -- 1D Structures — Field Confinement Approach -- Excitons in GaAs Quantum Wells: Interface Disorder and Mobility --
Nonlinear Optics and Electro-Optics of Quantum Wells -- Quantum Interference Effects in Small Systems: Normal and Superconducting Networks -- 2D Localisation and Interaction Effects in Semiconductor Structures -- Optical Nonlinearities
in Small Particles and Composite Materials -- Tunnel Currents and Electron Tunnelling Times in Semiconductor Heterostructure Barriers inPresenceanMagnetic Field -- III Perspectives in Microfabrication Applications -- Scaling Limits of
Silicon VLSI Technology -- Three Part Series on Heterojunction Transistors -- CAD: Overview and Perspectives -- Silicon-on-Insulator Technology Leading Towards Three-Dimensional Integration of Microelectronics -- The Metal Base
Transistors -- An Integrated Microfabrication System for Low-Dimensionality Structures and Devices -- Fabrication of Gate Array Interconnect Structures Using Direct-Write Deposition Processes -- Electronic Neural Computing -- IV Poster
Session, Abstracts -- Fabrication of Submicron Structures Combining E-Beam and Deep-UV Exposure -- Fabrication of Short-Gate GaAs MESFETs by Electron Beam Lithography -- 2D Josephson Junction Networks -- Electric Field Heating of
Supported and Free-Standing AuPd Fine Wires -- High-Frequency Limits of Quantum Noise Detectors Based on Superconducting Tunnel Junction Mixers -- Photoresponse and Transport Properties of a ‘Quasi’ Graded Gap Superlattice P-I-N Diode
-- Disorder and Two-Dimensional Electronic Sub-Bands -- A Model for the Oscillatory Structure in the J(V) Characteristics of GaAs/(AlGa)As Tunneling Structures -- A Minute Metallic Sphere Close to Flat Metal Surface System: A Scanning
Tunneling Microscope Problem -- A Calculation of the Effect of Subband Structure on the Thermopower of a Quasi-1D Wire -- The Effect of Electron-Electron Scattering on the Distribution Function in Semiconductors -- Index of
Contributors
ISBN:9783642714467
Series:eBooks
Series:SpringerLink (Online service)
Series:Springer eBooks
Series:Springer Proceedings in Physics: 13
Keywords: Materials science , Engineering , Electronics , Microelectronics , Optical materials , Electronic materials , Materials , Thin films , Materials Science , Optical and Electronic Materials , Electronics and Microelectronics, Instrumentation , Surfaces and Interfaces, Thin Films , Engineering, general
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